411 超音波原子間力顕微鏡による PZT ドメイン境界の弾性特性評価

Abstract

Recently, piezoelectric devices are used in various fields, such as memories, ultrasonic transducers and micro-actuators. Understanding of the sub micron order elastic property and domain structure for the development of piezoelectric devices is important. Ultrasonic atomic force microscopy (UAFM) can evaluate the elastic property of nm order. In this research, we improve the cantilever holder to improve the measurement accuracy of UAFM, and apply it to observation of piezoelectric materials with multi-domain structure.