4108 小型ズームカメラ向け静電アクチュエータの開発(S67-2 アクチュエータシステム(2),S67 アクチュエータシステム)

Abstract

This paper describes a newly developed linear electrostatic micro actuator for a camera module. Authors have proposed the electrostatic actuator with vibrating motion of the slider in order to avoid the influence of friction. The micro actuator consists of a slider, two electrodes and several parts. The slider is sandwiched between the plate whose surface has four-phase comb-electrode and the plate whose surface has two-phase electrode. This paper describes the relationship between the slider surface flatness and the actuator driving force. And we confirmed that the actuator driving resolution with plastic slider is 16μm long. These test results shows the possibility to realize the micro zoom camera module with this electrostatic actuator with plastic sliders.