40kV용 투과 양극형 x-ray tube의 개발 및 특성분석

Abstract

휴대용 XRF (X-Ray Fluorescence) 장치에 적용할 수 있는 40 kV용 투과 양극형 W-Target tube와 Rh-Target tube를 개발하고 특성을 조사하였다. 특성 x-ray의 에너지와 연속 x-ray의 선량특성은 알려진 결과와 잘 일치함을 확인하였고, 최대 선량을 추출하기 위한 양극금속 박막의 최적 두께는 W-target tube의 경우 약 <TEX>$2.6{\mu}m$</TEX>, Rh-target tube의 경우 약 <TEX>$2.7{\mu}m$</TEX> 임을 밝혀내었다. 또한 관전압 40 kV, 관전류 <TEX>$60{\mu}A$</TEX>로 30분 동안 연속적으로 작동시켰을 때 양극에서의 온도는 <TEX>$50^{\circ}C$</TEX>를 넘지 않아 휴대용 XRF장치에 적용할 수 있음을 확인하였다. Tungsten and rhodium target tube for a 40 kV x-ray transmission anode was developed to apply to the hand-held XRF(X-Ray Fluorescence) apparatus and its characteristics were evaluated. From the measurement of the energy distribution and dose of x-ray, it was confirmed that our results were good agreements with the known ones. The optimum thickness of metal film deposited on Be window to extract the maximum dose were <TEX>$2.6{\mu}m$</TEX> and <TEX>$2.7{\mu}m$</TEX> in case of W-target tube and Rh-target tube, respectively. When it was continuously worked during 30 min. at 40 kV in tube voltage and at <TEX>$60{\mu}A$</TEX> in tube current, the temperature at target did not exceed <TEX>$50^{\circ}C$</TEX>. Our results reveals that the 40 kV x-ray transmission anode tube can be applied to the hand-held XRF apparatus.