Abstract
Ion beam assisted deposition (IBAD) has been widely used for high-quality coatings in various areas. In this chapter, we reviewed the fundamental characteristics of IBAD. In addition to the conventional IBAD technique, emerging IBAD techniques such as the gas cluster ion beam (GCIB) assisted deposition and the three-dimensional nanostructure formations with focused ion beam (FIB) were also introduced. IBAD is considered as a mature technology; however, new applications of IBAD have been developed using GCIB or FIB.
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