40 μm Ag/Au Flip-Chip Joints by Solid-State Bonding at 200°C

Abstract

In this research, 40 μm silver/gold (Ag/Au) composite flip-chip interconnect joints between silicon (Si) chips and copper (Cu) substrates were demonstrated. The bonding was achieved by a solid-state process at a low temperature of 200°C for 5 min with the pressure applied at 250–400 psi (1.7–2.7 MPa), corresponding to 0.22–0.35 g of force per joint. To begin with, an array of 50 × 50 30 μm Ag/10 μm Au columns with 40 μm in diameter and 100 μm in pitch was fabricated by photolitho-graphic and electroplating processes on silicon (Si) chips which were first coated with chromium (Cr) and Au films. The columns on the chip were then bonded to a Cu substrate by solid-state bonding. Cross-sectional scanning electron microscopy (SEM) images show that the exposed Ag/Au columns were well bonded to the Cu substrate. No joint breakage was observed despite the large coefficient of thermal expansion (CTE) mismatch between Si and Cu. A pull test was conducted. The breaking force and fracture strength are 6.5–7.3 kg and 2,940–3,310 psi (20.2–22.8 MPa), respectively. The breaking force is 2.5× of the criterion specified in MIL-STD-883E. Fracture modes were examined. Three modes were classified by fracture interfaces as Si-glue, Si/Cr/Au/Ag, and Au-Cu bonding interface. Of all joints evaluated, 27% of them break on the Au-Cu substrate bonding interface. Accordingly, the bonding interface is least likely to break among interfaces of the joint structure.