Abstract
Very precise 3D fibre channels are fabricated by defined electrical breakdown in crystalline silicon followed by wet anisotropic etching in KOH: it is an extension of the well-known V-grooves that are already extensively used in fibre assembly. It allows to integrate large 2D-arrays of precisely aligned fibres in { 1 1 0 } -silicon or to adjust four fibres in a pyramid-shaped configuration into { 1 0 0 } -silicon in such a way that they all meet in a single point. The fabrication technology is presented and possible applications are described.
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