Abstract
A method for continuous 3D visualization of the mold filling at a microscopic level during athermoplastic nanoimprint process was developed. It is based on superposition ofmicrographs of a series of different stages of imprint. It was applied to two common3D microscopies with different resolution limitations. Due to advanced imageprocessing, the animated movie sequence, available as supplementary multimediainformation in the online version of this journal, gives an unprecedented insightinto the complex polymer flow and shows how voids are forming and vanishingduring the imprint process around micropillars. The method has advantages overcurrent real-time methods and can be used as an analytical tool for optimization ofprocesses and improvement of stamp design down to the sub-10 nm nanometer range.
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