Abstract
This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing design time with 3D simulations running on High-Performance Computing (HPC) cloud services. It also enables the identification of manufacturing effects on device performance. The simulation results are compared and validated with a manufactured FBAR device, previously reported, to further highlight the usefulness and advantages of the 3D simulations-based design process. In the 3D simulation results, some analysis challenges, like boundary condition definitions, mesh tuning, loss source tracing, and device quality estimations, were studied. Hence, it is possible to highlight that modern FEM solvers, like OnScale enable unprecedented FBAR analysis and design optimization.
Highlights
There still exist challenges that limit the level of representation accuracy of modern 3D Finite Element (FEM) simulation tools available today
A methodology for extraction of Butterworth-Van Dyke model (BVD) parameters of Film Bulk Acoustic Resonators (FBAR) was programmed in MATLAB
The FBAR model frequency characteristic is obtained through FEM simulations or measurements
Summary
AWRs are currently used in a variety of applications as Radio Frequency (RF)
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
