Abstract

In this paper, we consider a femtosecond laser processing system for ITO glass. To maximally deliver the laser energy, i.e., to focus the laser on the ITO glass, we propose a 3D shape restoration system for error compensation. The shape restoration system utilizes line laser and 2D profile image from the acquired profiles of the ITO glass. The proposed system is composed of line laser, high resolution camera, linear motion platform synchronized to image capturing, and control station. The results of the proposed system are compared with the results of SPM (scanning probe microscope) and prove the usefulness of the system

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