Abstract
We have developed two technologies for 3D magnetic microstructures, with a wide size range between 5μm to 2mm. The first technology enables us to obtain density controlled 3D magnetic microstructures. The size of this structure is approximately 500 μm. In this scale, controlling density is vital for magnetic micro actuators, because the effect of gravity is strong. To adjust density, we developed the world's first “density controllable magnetically modified photocurable (DMPC) polymer.” In addition, we succeeded in 3D velocity control of a screw-type magnetic micro actuator with neutral buoyancy in water. The second technology realized a 5μm magnetic micro actuator, which is a combination of a 3D transparent structure and 2D magnetic structure. Furthermore, we have succeeded in 2D driving a ferromagnetic micro actuator, whose diameter is as small as 1 μm. These two fabrication processes will become key technologies in the medical field, because they can supply a wide variety of 3D microstructures with small effort.
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