3D Reconstruction of Rough Surfaces by SEM Stereo Imaging

Abstract

The paper describes the current state of a multidisciplinary research project which aims to apply advanced stereovision methods to the 3D reconstruction of rough surfaces using scanning electron microscopy (SEM) imaging. SEM stereo imaging compares very favourably to atomic force microscopy (AFM) in a medium range corresponding to elevations less than 10 µm and scanned size less than 100 µm. But the interest of the stereoscopic method is that it enables to characterise wider fields with higher elevations.