3-D PTFE microstructure fabricated using synchrotoron radiation etching

Abstract

Microfabrication technique using SR ablation for 3-D polytetrafluoroethylene (PTFE) structure is reported in this work. First of all, we investigated necessary basic data for the fabricated structure like the processing depth and the etching rate, etc. And, the exposure energy distribution was given to the surface of polytetrafluoroethylene by using the plane pattern to cross-section transfer (PCT) technique, 3-D microstructures was fabricated. To establish three dimension of highly accurate PTFE processing technology, we are researching the application to the device.