Abstract
The paper presents a technique to optimize electrostatic micromotors. The finite element technique is combined with different types of optimization strategies, one of them, a version of the evolution strategy is discussed. It further involves an automated generation of 3D meshes where the dimensions and rotor positions of the motor models can be chosen arbitrarily. It also involves constructing equivalent circuit models for the electrostatic motors. Both, the automated 3D mesh generation and the construction of the equivalent circuit model are treated in detail in this paper. The possibilities of producing powerful tools in the field of optimization are described, but also some warnings and limitations concerning the automated optimization are mentioned.
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