Abstract

We very briefly review our recent progress regarding three-dimensional (3D) optical laser lithography or “3D direct laser writing (DLW)”. We focus on approaches inspired by 3D stimulated-emission depletion (STED) to break the diffraction barrier, on 3D dip-in DLW to obtain very tall structures with fine features, and on galvo-scanner based 3D DLW to increase the writing speed by two orders of magnitude.

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