3D OPC method for controlling the morphology of micro structures in laser direct writing.

Abstract

A 3D optical proximity correction (OPC) method for controlling the morphology of micro-structures in laser direct writing is proposed, considering both the optical proximity effect and nonlinear response of a thick-film photoresist. This method can improve the manufacturability and optical performance of devices, and can be used for most 3D micro\nano structures. Its application in the fabrication of a quadratic curvature microlens array shows that the shape of the lens is well controlled; that is, when the height of the lens is 5.25 µm, the average height error of the lens shape is less than 5.22%.