3D Nanolithography via Holographic Multi‐Focus Metalens

Abstract

Abstract3D nanolithography based on two‐photon polymerization (TPP) allows for the high‐precision fabrication of nearly arbitrary 3D micro/nanostructures, finding extensive applications in areas such as micro‐optics, micro‐mechanics, and biomedicine. However, the large size, complexity of optical systems, and high costs have significantly constrained the widespread adoption of 3D nanolithography technology in both scientific research and industry. In this study, a metasurface is introduced, for the first time, into 3D nanolithography resulting in the construction of a miniaturized and simplified TPP system that achieved efficient multi‐focus parallel processing with high uniformity. A microlens array is fabricated, showcasing the system's application capacity to generate an array of devices with high consistency and quality. It is believed that the utilization of metasurface devices will provide a novel TPP operating platform, enabling richer and more flexible printing functionalities while maintaining system miniaturization and low cost.