Abstract
Three-dimensional (3D) microstructures are fabricated by prism-assisted inclined ultraviolet (UV) lithography. The exposure angles of slanted structures ranging from 0° to 65° in SU-8 photoresist can be easily achieved without immersion in index matching liquid. The sample surface reflection of UV light can be utilized for the fabrication of symmetric structures. Tripod structures have been fabricated by one-step UV exposure with corner prism. Examples of various achievable 3D microstructures are presented.
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