Abstract
Micromachined toroidal planar inductors that have three different magnetic core structures have been designed, fabricated, and characterized for MEMS and power electronic applications. A plain ring core shows a high inductance value of 10 /spl mu/H in a low frequency range below 2 kHz, whereas both a ring core with an air gap and a spiral type core show higher inductance values in a high frequency range of 2 kHz-1 MHz. The inductors have a low resistance value of /spl sim/1.5 /spl Omega/ with total dimensions 4 mm/spl times/1.5 mm/spl times/120 /spl mu/m.
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