3D MEMS Design Method via SolidWorks

Abstract

To enable MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment, this paper describes a MEMS design strategy that uses parameterized three-dimensional (3D) part features to construct geometric models of MEMS devices and then generates mask-layouts and process flows automatically. SolidWorks, an outstanding 3D design tool, is utilized to build the 3D model of the MEMS device. Most frequently-used 3D MEMS part features are created in SolidWorks and saved to a user database through Application Programming Interfaces (APIs) of SolidWorks. When designing a MEMS device, the designer develops its 3D model by selecting 3D part features from the database, and then uses Finite Element Analysis (FEA) to refine the model until it exhibits the desired characteristics. Next, the model is used to generate mask-layouts and process flows. Finally, it is necessary to verify whether the mask-layouts and process flows are generated correctly by reconstructing them into a 3D geometric model and comparing it to the designed 3D model. If there are differences between them, the designer is supposed to modify the mask-layouts and process flows until they can result in the desired shape of the MEMS device.