Abstract
TEM, HAADF-STEM tomography and FIB/SEM tomography studies have been carried out to visualize three-dimensional morphology of the oxide dispersoids in ferritic ODS alloy INCOLOY MA956. Electron tomography results provided quantitative data about particle shape, size and distribution of the particles, complementary to those obtained by means of quantitative TEM metallography. It was shown that FIB/SEM, a meso-scale tomography technique, is suitable for 3D reconstruction of the objects of 100 nm in size or even smaller.
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