Abstract
We present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. A Taiwan 3D terrain map is selected to demonstrate the ability of the proposed method. We will introduce the idea of this approach, fabrication details and plenty of successful experimental results in this paper.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
