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Abstract
A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand and its environment. The sensor measures the normal force and two perpendicular moments by dividing the read-out into four quadrants. The fabrication process is based on silicon fusion bonding allowing the realization of extremely small gaps (250nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16pF/N and a full-scale range of 50N.
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