Abstract
We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensional (3D) shapes fabricated by non-ablative femtosecond laser exposure combined with chemical etching. Further, we present a single-scan stacking approach exploited in the fabrication of the 3D actuator to create crack-free, highcontrast, high fidelity and integrated micro-structures. Influential parameters: energy per pulse, polarization, scanning spacing and stacking directionwere systematically studied to predict and control the etching rate of 3D planes.Finally, we report the characterization of the actuator and its potential application in optomechanics to show a complete scenario of femtosecond laser machined integrated 3D micro-systems incorporating multiple functionalities.
Highlights
An actuator is a type of device that converts its operating energy source into motion and/ or force in a controllable and preferably, in a reversible way
We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensional (3D) shapes fabricated by non-ablative femtosecond laser exposure combined with chemical etching
We report the characterization of the actuator and its potential application in optomechanics to show a complete scenario of femtosecond laser machined integrated 3D micro-systems incorporating multiple functionalities
Summary
An actuator is a type of device that converts its operating energy source into motion and/ or force in a controllable and preferably, in a reversible way. Femtosecond laser micro-machining and subsequent chemical etching, using aqueous solution of hydrofluoric acid (HF), has shown its great potential in fabricating monolithic 3D devices that combine multiple functions, like fluidic, mechanical and optical functions [ 1 ]. It could open up the third dimension for existing actuation principles for development of integrated 3D micro-actuators. To preserve the shape and get a higher yield rate, we developed a single-scan stacking approach for fabrication of crack-free structures. Taking advantage of the patterning strategy developed, we managed to fabricate crack-free structures of good shape control for DEP actuation. The general characterization of the designed DEP actuator is presented to demonstrate the possibility of femtosecond laser machined multi-functional micro-systems
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