3D Data Acquisition and Reconstruction from SEM Stereo Pairs

Abstract

The image processing technology has now been widely applied into many areas such as electronics, manufacturing and security. However, most of those applications are based on two dimensional images. Recently, there are increasing demands of 3D information for new applications. The incoming visual information via a digital imaging device (ex. CCD) is digitized into pixels in plane with color/gray scale. Each pixel contains 2D positional information, the CCD thus offers an 2D orthogonal coordinate, but loses the 3rd dimension in depth for objects in view. The aim of this research is to develop an algorithm for acquisition and configuration of 3D information by means of binocular stereo vision. In this paper, the 3D data acquisition and reconstruction are demonstrated at static SEM stereopairs. Also the accuracy of acquired data is discussed.