Abstract
Abstract This paper presents the optical hydrogen sensor based on transparent 3C-SiC membrane and photovoltaic effect. Gasochromicmaterials of Pd and Pd/WO 3 were deposited by sputter on 3C-SiC membrane for gas sensing area. Gasochromic materials change totransparency by exposure to hydrogen. The variations of light intensity by hydrogen generate the photovoltaic of P-N junction betweenN-type 3C-SiC and P-type Si. Single layer of Pd shows higher photovoltaic compared with Pd/WO 3 . However, phase transition from itoðis shown at 6 %. Pd/WO 3 structure show the more linear response to hydrogen range of 2 % _10 %. Also, almost 2 times fast responseand recovery characteristics are shown at Pd/WO 3 . These fast performances are come from the fact that Pd promoted the chemicalreaction between hydrogen and WO 3 . Keywords : Optical Hydrogen Sensor, 3C-SiC Membrane, Photovoltaic ²yu× AN×·Ð R Ea± ¸Dý?8ES5aÝo Au×>Id a N+Dn7K AN AD cX7 1 I A( q ©E Þ×u×> D `u?x Ai ¨ au×A²>PE:Si EÞ>Nu×A²o A²(} b 'u×A²D hNýy(>R0Ýx AyÝxNy AD a ©ED$ ÷?8r ¨ ÞSinA²LExK} b 'u×A²D EyN 3: aa(Du×3hN ÞÝ A× a |8NaeiIÞ a$ ÷?8O ÞÝ$ cu×DZ 1 An21E80
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