Abstract
This paper presents a new fine and coarse (dual) positioning system with a piezoelectric actuator integrated into the support unit of a ball screw. In order to drive the fine and the coarse motion mechanism synchronously, a new controller is designed. We tune control parameters and simulate tracking performance by using the dynamic model of the system. After that, positioning tests were carried out. Test results show that the positioning system has good tracking capability with a tracking error less than 0.2μm with decreasing the stick motion.
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