Abstract
We prepared MgO films using e-beam deposition and polycrystalline MgO pellets and oxygen flow rates of 50 sccm and 100 sccm. These films were examined in gas discharge tests at different temperatures. The dependence of the discharge delay time on film temperature was smaller for the film grown at 100 sccm O2 flow compared to the film grown at 50 sccm. Their wall charges were also measured. This revealed that MgO films grown at 100 sccm had more wall charges. The analysis showed a difference in surface roughness. MgO films with a larger surface roughness had more wall charge.
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