Abstract
For measuring the surface profile of soft thin films such as photoresists we proposed the method using multiple ball cantilevers and constructed a multi-ball-cantilever AFM system, which covers a wide area at high speed. Each cantilever has a ball stylus with a diameter that dose not plastically deform measured surfaces. In this research, to realize high accuracy in measurement, we observed the behavior of the multi-ball-cantilever using the white light interferometer. We discussed the nano measurement characteristics of the multi-ball-cantilever by measuring the step height standard.
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