Abstract

This paper describes a CFD method based on the Boltzmann equation developed for low Mach number micro flows. Reliability and flexibility of the methods are demonstrated for flow simulation about micro channels and micro spheres at the Mach number range from 0.0001 to 0.1 and the Knudsen number range from 0.01 to 0.1. Reliable results without any fluctuation are obtained even for the flow Mach number of 0.0001. Fully developed velocity profiles of the micro channels well agree with those of slip flow model. The drag coefficients of the micro spheres are compared with those of continuum and slip flow theory. It is confirmed that the method is a good tool to analyze micro gas flows.

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