Abstract
DLC (Diamond-like carbon) films have attractive properties that make it a good candidate for a wide range of critical engineering applications. DLC films with different hydrogen contents were deposited using plasma CVD and ion beam deposition methods with different raw materials. The effect of humidity on friction of DLC films differed depending on hydrogen contents, sliding speed, and normal load. The wear of DLC films in dry air was larger than that in humid air. The features of wear surfaces of DLC films varied by changing sliding conditions.
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