3017 AIPによる配向制御したTi-N-B硬質被膜のドライ条件下におけるトライボロジー特性(S32-1 表面改質とトライボロジー(1),S32 表面改質とトライボロジー)

Abstract

In order to decrease friction loss of mechanical parts, we have researched the tribological properties of TiN coatings with the preferred orientation grains deposited by Arc Ion Plating. It is possible to control the preferred orientation of TiN thin film due to change the substrate bias voltage. In ball-on-disc friction test, TiN coatings with (111) preferred orientation reveal lower coefficient of friction (about 0.2) than those with (200) preferred orientation. Furthermore, we have examined to improve the frictional properties of TiN coatings by combining the grain orientation control and the addition of third element in AIP process. The coefficient of friction for TiN coatings with (111) preferred orientation added Boron as third element (the orientation controlled Ti-N-B coatings) is measured by the ball-on-disc friction test. In various sliding conditions, it is found that the orientation controlled Ti-N-B coatings are able to maintain low coefficient of friction (about 0.2) in comparison with TiN coatings.