Abstract
Mechanical properties of carbon nano-tubes (CNTs) film grown on silicon carbide substrate fabricated by surface decomposition process were measured by indentation methodology. Not only a pyramid indenter but also sphere one was used for the measurement. It was confirmed that the indent load for the evaluation within the film by sphere indenter was significantly larger than that tested with pyramid indenter. Elastic recovery and yield stress of CNTs film were evaluated from the observation of the impression and the load-displacement curve, and applicability of sphere indentation technique was discussed.
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