Abstract
In this paper, we have demostrated high PBTS top‐gate self‐aligned IGZO TFTs by employing different H‐incorration process. Through optimization processes, PBTS is improved to 0.29 V and Vth deviation on Gen. 4.5 glass is 0.4V. Finally, 31‐inch OLED TV employing GOA circuit applied by this optimized backplane was successfully demonstrated.
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