Abstract
We prepared 10 μm-sized poly(dimethylsiloxane) (PDMS)-based cubic microparts to form 3D microperiodic structures by self-assembly of the microparts. Self-assembly is a promising candidate for fabricating the 3D periodic structures such as optical microdevices. The PDMS-based microparts, which have high transparency in ultraviolet (UV) to near infrared (NIR) light, were fabricated by a combined process of photolithographic techniques and UV-ozone treatment. First, cubic molds of thick photoresist were formed by the lithography. Then, PDMS filled into the molds, following that it was cured by heating at 80°C. After that, the microparts were separated using UV-ozone treatment and ultrasonic microwaves. The microparts were dispersed into the water an ethanol mixed solution with surfactant F-127 to prepare the suspension. The surfactant was useful to prevent aggregation of microparts. Finally, we demonstrated the self-assembling of the PDMS microparts by putting a droplet of the suspension on a glass substrate, and drying at room temperature with turning substrate upside down. The microparts were partly aligned with the cubic closed packing by self-assembly. This result indicates that PDMS-based cubic microparts have possibility of forming three-dimensional periodic structures.
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