Abstract
In this paper, grazing scattering of 3keV Ar along the [100] direction of an ideal (unreconstructed) Si(100) surface is simulated using the molecular dynamics (MD) method. A detailed analysis of the scattering trajectories is performed. The scattering process in many cases involves a sequence of simultaneous collisions between projectile and target atoms. The scattered intensity is presented as a function of the polar scattering angle, the azimuthal scattering angle and the energy loss. Various prominent features of the spectra are assigned to specific scattering trajectories.
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