Abstract
In this study, we have fabricated a three branches vertical Hall sensor for detecting three phases rotation informations of miniaturized brushless motor. The sensor gives three position signals phase shifted by , corresponding to the motor driving signals. The branch has one Hall output and one input each other. The central part acts as common driving input. Sensor has branch width of and distance from central electrode to Hall electrode of . The sensitivity of sensor is 250 V/ at magnetic field of 0.1 T. It has also showed three sine waves of Hall voltages with phase over a rotation. A packaged sensing part are and has been successfully tested on a motor rotation at a speed up to 60,000 rpm.
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