3-D Printed Polymer MEMS

Abstract

This paper describes fabrication of complex 3-D printed Polymer MEMS Devices. Since geometric complexity is not a concern for 3-D printing, complex 3D microfluidics, MEMS and lab-on-a-chip devices can be easily fabricated that are otherwise time consuming and difficult to manufacture with state of the art 2-D MEMS fabrication technology. Furthermore, 3-D printed MEMS technology elimates the need for expenisve infrastruce required to manufacture MEMS devices such as clean room, photolithography equipment, masks etc.