Abstract

The main challenge in designing an interface circuit for capacitive displacement sensors with sub-nanometer resolution is the large offset capacitance of the sensor. This offset capacitance is a result of the relatively large distance between the sensor electrodes, compared with the displacement range to be measured. From the different methods with which to interface capacitive sensors, a charge-balancing technique is used here to demonstrate a power-efficient way to remove the offset, while maintaining high resolution and short conversion time. As an example, the design of an oversampling capacitance-to-digital (CDC) converter based on a third order sigma/delta modulator is presented.

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