Abstract
An actuator with three degrees of rotational freedom has been developed as a component of micro machines. This actuator consists of a rotor and several drive units which moving tips are attached with the rotor. Each drive unit has a trass structure composed of three piezoelectric actuators. The rotor is driven by frictional force generated between the rotor and the drive unit and can rotate in three directions with cooperative motion of the drive units. In this paper, the principle of this actuator is presented. Next, a position control method which realizes cooperative motion of three piezoelectric actuators, for the drive unit is proposed. Then, the dynamical simulation results of the drive unit and some experimental results are shown. These experimental results show that the drive unit can generate the desired elliptical trajectory with the proposed cooperative control method.
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