Abstract
Pneumatic actuators such as pneumatic cylinders have been used widely in industries because pneumatic actuators are simple, lightweight, cheap and suitable for achieving a high speed liner motions. In general, pneumatic actuators need speed controllers to avoid the stopping shock at the stroke ends. This study aimed at a development of a new mechanism of a flow control valve driven by PZT. In this report, new prototype valve that aims miniaturization has been designed using the finite element method and made. The new prototype is 10mm in diameter and the piezoelectric element is fixed by using the bolt. The experimental results show that the new prototype achieves a maximum flow rate of 62.65 L/min under applying voltage of 79.9V_<p-p>. The results show that the valve can control the relatively larger flow rate compared to their weight and size.
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