Abstract
In this paper, we propose the on-chip capacitive force sensor for ultrahigh speed cellular force measurement. In order to apply the capacitive force sensor to microfluidic chip, on-chip force sensor utilizes the air-liquid interface due to isolate liquid form comb electrodes. We have designed and fabricated the capacitive force sensor with cell culture chamber as a kind of microchannel to the several pm order cell. Air-liquid interface between the force sensor tip and comb electrodes have achieved. As a result, we have succeeded in measurement of capacitance of on-chip force sensor as a function of displacement of probe tip in wet condition.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
