2A1-O06 ねじり振動子共振駆動型極低温用超音波モータ(アクチュエータの機構と制御(1))

Abstract

In this study, a torsional transducer type ultrasonic motor which realizes the continuous rotation and the positioning of the angle in cryogenic temperature has been fabricated and evaluated. In the cryogenic temperature environment, the performance of the transducer falls. In order to drive the motor at cryogenic temperature, the torsional transducer is designed to generate the resonant stick-slip drive. The transducer can perform the resonant stick-slip drive by combining the first and the second vibration mode. The ultrasonic motor using the transducer was evaluated. The rotation speed and the starting torque are 111rpm and 0.75mNm at 4.5K. Moreover, a velocity control became possible in the low-speed range below 1.0rad/s by using a burst waveform.