Abstract
We have been developing a novel bimetal MEMS calorimeter as a high-sensitivity photothermal detector having large size for high-throughput optical radiometry. Prototypes of the Si/Al bimetal MEMS sensors of up to 5 mm × 5 mm in active area, based on the design optimized by finite element simulation, were fabricated via SOI processes. Their thermo-mechanical displacements can be measured with a Fabry-Perot interferometer. Noise equivalent power (NEP) of the sensor system was estimated to be several tens of nW at room temperature and atmospheric pressure, which is comparable to the conventional thermoelectric devices. Further reduction of the NEP toward sub-nW would be possible by high-sensitivity interferometry and appropriate noise reduction.
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