Abstract
Proton exchange membrane fuel cells (PEMFCs) are promising systems for mobile and vehicle applications because of their high power density and low operating temperature. This characteristic causes the several problems, such as water management. Then for measuring the local humidity inside membrane electrode assembly (MEA), the thin film humidity sensors are fabricated by the micro-electro-mechanical systems (MEMS) based techniques. The sensor was placed between the catalyst layer (CL) and the microporous layer (MPL) at the cathode. The slight effects on total cell performance were observed with the insertion of it. In-situ measurement with a humidity sensor showed the capacitance and RH increased with the increase of the current density linearly up to 0.3 A/cm^2. The capacitance change became moderate in the region of current density 0.3 A/cm^2, because the relative humidity reached 100% at the 0.3 A/cm^2 and water started to accumulate.
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