Abstract
This paper reports the development of MEMS rotational electret energy harvester (EH) for human motion. Optimal design of MEMS EH is proposed by considering both the rate of overlapping-area-change and the parasitic capacitance. Number of poles is optimized with the present design method. A rotational MEMS EH with embedded ball bearing has been successfully developed. Up to 3.6 μW has been obtained at 1 rps rotation with an early prototype.
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