Abstract
This study presented a measurement error for determining the thickness of thin film lubrication based on optical interference methods. The measurement error is caused by the reflective index distribution on the sliding surface, which is characterized by the profile of the surface. In order to demonstrate the measurement error, two types of model specimens with different surface roughness were prepared. Using these specimens, the optical interference measurements of film thickness were performed. As a result, it was found that the reflective index distribution sometimes acts to underestimate the measurement values of the film thickness. The finding of this study provided a new insight for improving the measurement accuracy of thin film measurement using optical interference methods.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: The Proceedings of the Symposium on Micro-Nano Science and Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
