Abstract
This study presented a measurement error for determining the thickness of thin film lubrication based on optical interference methods. The measurement error is caused by the reflective index distribution on the sliding surface, which is characterized by the profile of the surface. In order to demonstrate the measurement error, two types of model specimens with different surface roughness were prepared. Using these specimens, the optical interference measurements of film thickness were performed. As a result, it was found that the reflective index distribution sometimes acts to underestimate the measurement values of the film thickness. The finding of this study provided a new insight for improving the measurement accuracy of thin film measurement using optical interference methods.
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