Abstract

This work presents a detailed RF characterization of 28-nm FD-SOI nMOSFETs at cryogenic temperatures down to 4.2 K. Two main RF Figures of Merit (FoMs), i.e., current-gain cutoff frequency (f t ) and maximum oscillation frequency (f max ), as well as parasitic elements of the small-signal equivalent circuit, are extracted from the measured S-parameters. An improvement of up to ~130 GHz in f t and ~75 GHz in f max is observed for the shortest device (25 nm) at low temperature. The behavior of RF FoMs versus temperature is discussed in terms of small-signal equivalent circuit elements, both intrinsic and extrinsic (parasitics). This study suggests 28-nm FD-SOI nMOSFETs as a good candidate for future cryogenic applications down to 4.2 K and clarifies the origin and limitations of the performance.

Highlights

  • Numerous studies focused on the cryogenic behavior of advanced CMOS technologies are mainly driven by the perspective of quantum computing applications [1]-[12]

  • The zero temperature coefficient (ZTC) point at which Id stays invariable with temperature (T) clearly appears at ∼0.83 V

  • In this work, the prospects of 28-nm fullydepleted silicon-on-insulator (FD-SOI) CMOS for future cryogenic RF applications have been assessed by the analysis of RF FoMs and complete small-signal equivalent circuit elements in the cryogenic temperature range down to 4.2 K

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Summary

INTRODUCTION

Numerous studies focused on the cryogenic behavior of advanced CMOS technologies are mainly driven by the perspective of quantum computing applications [1]-[12]. To enable cryo-CMOS, it is essential to embed digital, analog and RF models in a process design kit in order to predict the MOSFETs performances and power dissipation at cryogenic temperatures as required for reliable circuit designs. This motivated several works [6]–[9] and [16]–[19] towards the analysis of advanced MOSFETs behavior at cryogenic temperatures. The present paper extends our previous work [18] It is the continuation of our previous study [17] on the RF performances of 28-nm FD-SOI transistors down to 4.2 K, the liquid-helium temperature. An analysis on the RF FoMs of the FETs is provided

EXPERIMENTAL DETAILS
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