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Abstract
MEMS is getting a lot attention in processing micro devices. But, these processing is limited to mass production and structure. So, micro machining is reconsidered because that is efficient way to process three-dimentional shape, to make complex structure. The propose of this investigation is to analyze the effect of material's inhomogeneity in carbon steel and size effect on the shape, accuracy of dimension, machinability. Micro scratching test is one of the methods to analyze these phenomena. This paper reports on the results of micro scratching conduct on the S25C and discussion on the deformation mechanism of cementite in pearlite.
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