Abstract
We designed and fabricated a diaphragm for hybrid structured pressure sensor of metallic glass and (100) Si. Metallic glasses are known to be homogeneous and isotropic in nanometer scales and they exhibit high strength, low elastic coefficient, large elastic strain and superior material functions such as corrosion resistance at a room temperature. This material also exhibits Newtonian viscous flow in the supercooled liquid temperature range between the glass transition and the crystallization temperature. In this study, we developed a sputtering target and deposited Zr-based metallic glass film on the (100) Si substrate by RF magnetron sputtering technique. By successive silicon process such as lithography and anisotropic etching, a hybrid structure of metallic glass and (100) Si has been fabricated. These fabrication processes demonstrate the advantages of metallic glasses and a technique for producing hybrid structured MEMS devices.
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