Abstract
In order to measure the pressure and the temperature of a contact between surfaces under a sliding-rolling contact condition, it was tried to develop a thin film sensor using MEMS (Micro Electromechanical Systems) process technology. In this paper, a contact pressure sensor was manufactured by Lift-off method. The sensor consists mainly of thin wires made of palladium and a thin polyimide film. The performance of the sensor was investigated using a compression testing machine and a Wheatstone bridge circuit. The output voltage of the sensor raised as the compressive load increased. However, the output voltage of the sensor was not stable.
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